| 摘要 |
<p>An electrode-less discharge source of extreme ultraviolet (EUV) radiation efficiently assembles a hot, dense, uniform, axially stable plasma column with magnetic pressure and inductive current drive. It employs theta-pinch-type magnetic compression of plasma confined in a magnetic mirror. Plasma, confined in a magnetic mirror, is made to radiate by resonant magnetic compression. The device comprises a radiation-source gas input nozzle, an optional buffer-gas input flow, mirror-field coils, theta-pinch coils, a plasma and debris dump, and an evacuation port. The circular currents yield an axially stable plasma-magnetic-field geometry, and a reproducible, stable, highly symmetrical EUV source.</p> |
