SPUTTERING APPARATUS HAVING LIFT ASSEMBLY,申请号KR20040061405-传众专利搜索

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发明名称	SPUTTERING APPARATUS HAVING LIFT ASSEMBLY
摘要
申请公布号	KR20060012769(A)	申请公布日期	2006.02.09
申请号	KR20040061405	申请日期	2004.08.04
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	HWANG, CHUL HEE
分类号	H01L21/203	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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