| 摘要 |
<P>PROBLEM TO BE SOLVED: To maintain damping property in a wide rage from a low frequency region to a high frequency region. <P>SOLUTION: An elastic support 3, a displacement sensor 4 and an active vibration eliminating device 5 are incorporated between an upper plate 1 and a lower plate 2. The elastic support 3 elastically supports a weight. The active vibration eliminating device 5 is a combination of a piezo-actuator 6 and a coil spring 7. The piezo-actuator 6 compensates for displacement due to the vibration of a vibration eliminating mount A with a control signal from the displacement sensor 4 as an input to prevent the vibration amplification of coil springs 2, 7 in a low frequency region. The coil spring 7 supports a load and damps the high frequency vibration of the piezo-actuator 6. The displacement sensor 4 detects a change of a space between the upper and lower plates and outputs the control signal to the piezo-actuator 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
