METHOD FOR REMOVING TITANIUM NITRIDE

摘要

PROBLEM TO BE SOLVED: To provide an efficient method for removing titanium nitride residue stuck on an inner wall or parts in the reactor. SOLUTION: A method for removing titanium nitride from a surface of a substrate comprises; (a) providing a process gas including at least one reactant selected from the group consisting of fluorine-containing substances and chlorine-containing substances; (b) enriching the process gas with at least one reactive species of at least one reactant to form an enriched process gas, wherein the enriching is conducted at a first location; (c) providing a substrate at a substrate temperature of higher than 50°C, wherein the surface of the substrate is at least partially coated with titanium nitride; and (d) bringing the titanium nitride on the surface of the substrate into contact with the enriched process gas to volatilize and remove the titanium nitride from the surface of the substrate, wherein the contacting is performed at a second location different from the first location. COPYRIGHT: (C)2006,JPO&NCIPI