| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine pattern correcting device and a coating stylus for correction that facilitate history management of the coating stylus, and can prevent trouble due to abrasion beforehand and maintain the quality of coating correction. SOLUTION: The fine pattern correcting device is provided for correcting a pattern defect part of a fine pattern provided on a plane substrate by applying correcting liquid with the coating stylus 13. An IC tag 17 is provided to a base part 15 of the coating stylus 13. Further, a head 18 which reads and write data out of and to the IC tag 17 is provided in a position where the head is communicable with the IC tag 17. Further, the correcting device is provided with a coating frequency writing means 41 of recording the coating frequency of the coating stylus 13 to the IC tag 17 through the head 18. COPYRIGHT: (C)2006,JPO&NCIPI |
