| 摘要 |
PROBLEM TO BE SOLVED: To prevent generation of corrosion of a sensor element other components on a sensor chip due to diffusion of corrosive components of a medium into gel. SOLUTION: An open loop control and/or a closed loop control can be performed so that the temperatures of micromachining type constitution elements 120 and 300 and/or a passivation material 160 surrounding the micromachining type constitution elements 120 and 300 may be set by heating elements 200, 210, 220, 230, 240 and 250. COPYRIGHT: (C)2006,JPO&NCIPI |
