| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe for surface resistivity measurement to stably measure surface resistivity of an object under measurement. SOLUTION: This probe 10a for surface resistivity measurement provided for a surface resistivity measuring instrument 1 used for measuring the surface resistivity of the object 100 under measurement, is equipped with an electrode 13 and a contact part 14a provided on the electrode 13 and making surface-contact with the object 100. The specific resistance of the contact part 14a is greater than that of the electrode 13. COPYRIGHT: (C)2006,JPO&NCIPI
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