发明名称 METHOD OF FORMING A CONDUCTIVE LAYER INCLUDING A LOCAL HIGH RESISTIVITY REGION AND SEMICONDUCTOR DEVICE FABRICATED USING THE SAME
摘要 A semiconductor device and methods thereof. The semiconductor device includes a first layer formed on a substrate, the first layer having a higher conductivity. The semiconductor device further includes a second layer formed on the first layer, the second layer including a hole exposing a portion of the first layer, the exposed portion of the first layer having a lower conductivity. The method includes forming a first layer on a substrate, the first layer having a higher conductivity, forming a second layer on the first layer, exposing a portion of the first layer by forming a hole in the second layer, performing a process on at least the exposed portion of the first layer, the process decreasing the conductivity of the exposed portion. The exposed portion including the lower conductivity or higher resistivity may block heat from conducting in the first layer.
申请公布号 KR20060012848(A) 申请公布日期 2006.02.09
申请号 KR20040061528 申请日期 2004.08.04
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO, SUNG LAE;HIDEKI HORII
分类号 H01L21/28 主分类号 H01L21/28
代理机构 代理人
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