| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fixture for substrate conveyance which easily removes a substrate from the fixture for the substrate conveyance, and suppresses the damage to the substrate which occurs when removing the substrate. <P>SOLUTION: In the fixture for the substrate conveyance, when fixing a flexible board 200 to a flat surface of a substrate 101 with an adhering material 102, a hole 104 for removal is arranged at a location countering an edge portion of the flexible board 200 in a region except an interconnect line formation region including a packaging region 204 of the flexible board 200 and an edge portion 205 in the flat surface. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
