| 摘要 |
PROBLEM TO BE SOLVED: To realize compact arm structure capable of conveying stably and highly accurately a substrate conveying base arranged at the edge of the conveyance arm which connects two sets of parallel links. SOLUTION: The conveyance arm 1 is constituted such that a first parallel link 10 and a second parallel link 20 are connected by a shared short joint 26, and a conveying base 50 arranged at the free end of the second parallel link 20 is made to move linearly by rotating operation given to the rotating axis of the arm end of the first parallel link 10. From each joint consisting of the shared short joint 26, an underside connecting plate 16 for connecting end fulcrums having a predetermined amount extension of respective arms 11 and 12 of the first parallel link 10, and an upper side connecting plate for connecting medium fulcrums 23, 24 having a predetermined amount inside of respective arms 21 and 22 of the second parallel link 20, are connected to a plate spring 18 arranged for maintaining parallel condition, so that lateral displacement to the direction of linear movement between connecting plates 16 and 17 may be regulated and relative displacement may be permitted by maintaining parallel condition of the connecting plates 16 and 17. COPYRIGHT: (C)2006,JPO&NCIPI
|
