| 摘要 |
PROBLEM TO BE SOLVED: To improve sensitivity and prevent smear by eliminating the occurrence of peeling-off of a shading film by forming a reflective reduction film after forming the opening of a shading film. SOLUTION: A solid state imaging device is provided with a sensor 21 for performing the photoelectric conversion of incident light, and a vertical charge transfer 23 for transferring the signal charge read out from the sensor 21, a reflective reduction film 37 for reducing the reflection of the incident light on the surface of the sensor section 21, and a shading film 35 for shading the vertical charge transfer 23. Further, it is equipped with a reflection reduction film 37 formed after forming the shading film 35 in the opening 36 on the sensor 21 formed in the shading film 35. COPYRIGHT: (C)2006,JPO&NCIPI
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