Method of manufacturing substrate having recessed portions for microlenses and transmissive screen

摘要

A method of manufacturing a substrate having recessed portions for microlenses, the substrate being provided with a plurality of recessed portions on a surface thereof and the microlenses being formed by supplying resin to each of the recessed portions, the method includes: forming an etching mask film; forming through holes in regions of the etching mask film where the recessed portions are formed by irradiating laser beams onto the regions and modifying the entire etching mask film by heating; and forming the recessed portions on the surface of the substrate by bringing an etchant into contact with the surface of the substrate exposed by the through holes.