| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a nonreflective periodic structural body having a large area and excellent periodicity. <P>SOLUTION: In the nonreflective periodic structural body, a structure having a period shorter than the wavelength of incident light is formed on a material surface and reflection of the incident light on the material surface is suppressed. A laser beam applied by using a phase grating mask which diffracts the laser beam applied from above and forms grid-shaped interference fringes is allowed to interfere, a resist coated or deposited on the material surface is irradiated with the coherent beam and is developed and, thereby, a pattern corresponding to the periodic structure is formed. Further, by using the patterned resist as a mask, the material surface is etched and, thereby, the nonreflective periodic structural body can be formed on the material surface. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
