PLASMA PROCESSING REACTOR WITH A MAGNETIC ELECTRON-BLOCKING FILTER EXTERNAL OF THE CHAMBER AND UNIFORM FIELD WITHIN THE CHAMBER

摘要

An external magnetic filter to trap electrons surrounds a reactor chamber and has multiple magnets arranged in a circle, the magnetic orientation of each individual magnet being rotated relative to the orientation of the adjacent individual magnet by a difference angle that is a function of the arc subtended by the individual magnet.

主权项

1. A plasma reactor comprising:
an enclosure comprising upper and lower chambers separated at an interface zone; a plasma source coupled to said upper chamber and a process chamber coupled to said lower chamber, said process chamber containing a workpiece support; and a circular magnetic array surrounding said interface zone and located outside of said enclosure, and comprising a circular succession of individual magnets of individual magnetic orientations, each individual magnetic orientation of each respective magnet being in a direction that is a function of an angular location in said circular magnetic array of the respective individual magnet.