发明名称 COMPOSITIONS AND METHODS FOR THE ELECTROLESS DEPOSITION OF NiFe ON A WORK PIECE
摘要 Methods and compositions are provided for the electroless deposition of NiFe on a work piece (30). A deposition solution for use in electroless deposition of NiFe on a work piece (30) is formed from a nickel ion source, a ferrous iron source, a complexing agent, a reducing agent, and a pH reducing agent. The deposition solution is substantially free from alkali metal ions. A method for fabricating a flux concentrating system for use in a magnetoelectronics device begins by providing a work piece (30) and forming an insulating material layer (34) overlying the work piece (30). A trench (36) is formed in an insulating layer (34) and a barrier layer (40) is deposited within the trench (36). A NiFe cladding (46) layer is deposited overlying the barrier layer (40). After depositing the NiFe cladding layer (46), the insulating material layer (34) proximate to the trench has a concentration of alkali metal ions less than about 1 x 10<sup
申请公布号 WO2005048275(A3) 申请公布日期 2006.02.09
申请号 WO2004US34832 申请日期 2004.10.20
申请人 FREESCALE SEMICONDUCTOR, INC.;D'URSO, JOHN, J.;MOLLA, JAYNAL, A.;KYLER, KELLY, W. 发明人 D'URSO, JOHN, J.;MOLLA, JAYNAL, A.;KYLER, KELLY, W.
分类号 C23C18/16;C23C18/50;H01L21/288;H01L21/768;H01L27/22 主分类号 C23C18/16
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