| 摘要 |
<P>PROBLEM TO BE SOLVED: To safely convey a mask without causing any deterioration of a throughput. <P>SOLUTION: A revolution arm 7 is provided with holders 73a, 73b holding a reticle R to be conveyed; and a revolution motor 71 revolving these holders 73a, 73b in an XY side. The holders 73a, 73b are provided with supporters 78a, 78b supporting edges of the reticle R from below; arms 77a, 77b which extend in the X direction and regulate a movement of the reticle R in the Y direction while interposing the reticle R in the Y direction; and reticle control members 79a, 79b which are provided at both ends of the arms 77a, 77b, respectively. The reticle control members 79a, 79b are provided with control units controlling a movement of the reticle R in the X direction in the state where the reticle R is interposed between the arms 77a, 77b; and reticle correctors 79c, 79d each consisting of a slope which guides the reticle R so that the reticle R may enter a region controlled by the control units accompanied with an interposing action of the arms 77a, 77b. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
