| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an abrasive cloth reducing peripheral edge sagging of a polished object such as a semiconductor wafer. <P>SOLUTION: In the abrasive cloth manufactured by impregnating resin into a nonwoven fabric 3, the nonwoven fabric 3 is formed by mixing heat fusion yarn in polyester fiber, and the heat fusion yarn has core-sheath structure wherein the surface of a core part is covered with a sheath part with a lower fusing point than the core part. With heating in a nonwoven fabric manufacturing process, the sheath part melts to form interlacing points with polyester fiber to thereby form the nonwoven fabric 3 with low compressibility and high modulus. Resin is impregnated into such a nonwoven fabric 3 to form the abrasive cloth with low compressibility and high hardness compared with a conventional one. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
