FOCUSED ION BEAM DEVICE AND METHOD FOR IRRADIATING FOCUSED ION BEAM

摘要

PROBLEM TO BE SOLVED: To provide a focused ion beam device converging an ion beam to a beam-spot position with no magnetic field without isotope separation on a sample even when a magnetic field exists on an optical axis of an ion beam and the magnetic field changes. SOLUTION: A correction magnetic field is generated on the optical axis of the ion beam 3 from a correction magnetic field generation part 10 to offset the deflection of the ion beam by an external magnetic field. COPYRIGHT: (C)2006,JPO&NCIPI