| 摘要 |
PROBLEM TO BE SOLVED: To provide such a construction that a sample does not damage itself, an electron lens nor break a detector by contacting with an object lens or the detector around the object lens, and easy to confirm interference, at low cost. SOLUTION: The charged particle beam device is composed of an electron gun 1 generating electron beams, a convergence lens system 3 for finely narrowing a primary electron beam 2 generated by the electron gun 1, an object lens 4, a sample stage 6 having a moving mechanism capable of moving with a sample 5 put thereon, a vacuum container 7 for maintaining high vacuum around the sample, with the object lens 4 arranged therein, housing the sample 5 and the sample stage 6 at observation, and a mechanism 8 for drawing the sample stage 6 out of the vacuum container 7. An interference detection member 9, having a shape of horizontal projection of the object lens 4 projected in a sample 5 drawing out direction, namely, in a horizontal direction, is arranged at an opening O for drawing out the sample stage formed on the vacuum container 7. COPYRIGHT: (C)2006,JPO&NCIPI
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