摘要 |
PROBLEM TO BE SOLVED: To highly precisely form a pattern for forming a high density ink passage. SOLUTION: The method for manufacturing an inkjet recording head comprises: a step for forming a resist layer 4 made of soluble resin which forms a pattern for forming an ink passage on a substrate 1 which has ink ejection energy generating elements 2 for generating energy for ejecting ink, a step for coating a heat shrinkable overcoat material 5 on the resist layer 4, a step for heat shrinking the overcoat material 5, a step for removing the overcoat material 5 from the resist layer 4, a step for forming a coating resin layer 6 for forming an ink passage wall on the resist layer 4, and a step for eluting the resist layer 4. COPYRIGHT: (C)2006,JPO&NCIPI
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