发明名称 Programmable mask and method of fabricating biomolecule array using the same
摘要 The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet ("UV") light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.
申请公布号 US2006030030(A1) 申请公布日期 2006.02.09
申请号 US20050100544 申请日期 2005.04.07
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 JUNG MOON Y.;SHIN DONG H.;KIM YOUNG J.;PARK SE H.;PYO HYEON B.;CHOI CHANG A.
分类号 C12M1/34;G02F1/13 主分类号 C12M1/34
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