发明名称 |
Programmable mask and method of fabricating biomolecule array using the same |
摘要 |
The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet ("UV") light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.
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申请公布号 |
US2006030030(A1) |
申请公布日期 |
2006.02.09 |
申请号 |
US20050100544 |
申请日期 |
2005.04.07 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
JUNG MOON Y.;SHIN DONG H.;KIM YOUNG J.;PARK SE H.;PYO HYEON B.;CHOI CHANG A. |
分类号 |
C12M1/34;G02F1/13 |
主分类号 |
C12M1/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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