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发明名称
Verfahren zur Nassätzung einer Silizium Halbleiterscheibe
摘要
申请公布号
DE69829737(T2)
申请公布日期
2006.02.09
申请号
DE19986029737T
申请日期
1998.02.10
申请人
NAOETSU ELECTRONICS CO., KUBIKI
发明人
SATOH, TSUTOMU
分类号
H01L21/00;H01L21/306
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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