TENSIONING APPARATUS FOR MASK, MASK SHEET, AND MANUFACTURING SYSTEM FOR MASK

摘要

A mask tensioning apparatus is disclosed. In one embodiment, the mask tensioning apparatus includes: i) a clamp supporting a mask sheet disposed on the mask frame to couple the mask sheet to the mask frame and ii) a tensioner connected to the clamp and applying a tensioning force to the clamp to fix the mask sheet fixed by the clamp to the mask. The clamp may be arranged in a substantially vertical or oblique direction with regard to the elongation direction of the mask sheet, thereby supporting the mask sheet.

主权项

1. A mask tensioning apparatus comprising:
at least two clamps configured to support a mask sheet placed on a mask frame to couple the mask sheet to the mask frame, wherein the mask sheet has a length and a width less than the length, and wherein the mask sheet has i) a linear middle portion and ii) first and second ends opposing each other and extending from the middle portion at an angle; and at least two tensioners configured to apply a tensioning force to the clamps to fix the mask sheet and apply the tensioning force to the mask sheet in the length direction of the mask sheet, each tensioner connecting to each clamp, wherein the clamps are arranged in a substantially vertical or oblique direction with regard to the direction of the length of the middle portion of the mask sheet.