| 摘要 |
An infrared sensor including a substrate, a membrane as a thin wall portion formed in this substrate, thermocouples in which a warm contact portion is formed on said membrane and a cold contact portion is formed outside said membrane on said substrate and an infrared ray absorbing film formed on said membrane so as to cover said warm contact portion in said thermocouples. Electromotive force of said thermocouples is changed by a temperature difference caused between said warm contact portion and said cold contact portion in said thermocouples at a receiving time of an infrared ray, and the infrared ray is detected on the basis of the changed electromotive force. A temperature sensing element using the same material as a material constituting said thermocouples and detecting temperature by utilizing the temperature depending property of electric resistance of this material is formed in said substrate.
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