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发明名称
ELECTRIC STATIC CHUCK FIXING STRUCTURE, FIXING DIE APPARATUS AND PLASMA PROCESSING APPRATUS
摘要
申请公布号
KR100549769(B1)
申请公布日期
2006.02.08
申请号
KR20030059750
申请日期
2003.08.28
申请人
发明人
分类号
H01L21/68;C23C16/458;H01L21/205;H01L21/683
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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