| 摘要 |
<p>A resonant micro-electro-mechanical system includes: a microstructure (102) having a mass (107), which is free to oscillate in accordance with a predetermined degree of freedom (X); and a driving device (103), coupled to the mass (107) for maintaining the mass (107) itself in oscillation at a resonance frequency (É R ). The driving device (103) is provided with a differential sense amplifier (109), supplying first signals (V RD1 , V RD2 ) indicative of a velocity of oscillation of the mass (107), and an actuation and control stage (111, 112, 113, 116) supplying second signals (V FBD1 , V FBD2 ) for driving the mass (107) on the basis of the first signals (V RD1 , V RD2 ). The driving device (103) moreover includes a filtering circuit (110) of a high-pass type, which is connected between the differential sense amplifier (109) and the actuation and control stage (111, 112, 113, 116) and has a bandpass (B) that includes the resonance frequency (É R ).</p> |
