| 摘要 |
PURPOSE:To improve the thermal conductivity, strength and heat-dissipation property of a sintered aluminum nitride by mixing a specific AlN raw material powder with an element oxide and an Si component, forming the mixture and sintering in a non-oxidizing atmosphere. CONSTITUTION:A mixed powder is produced by mixing AIN powder having an impurity cation (Fe, Mg, etc.) content of <=0.2wt.% and an average particle diameter of 0.05-2mum with 1-10wt.% of an oxide of at least one kind of element selected from the group IIIa element of the periodic table, Ca, Sr and Ba, 0.01-0.2wt.% of an Si component such as SiO2 and Si3N4 and 5-10wt.% of an organic binder. The mixed powder is formed, heated at 400-800 deg.C in a non- oxidizing atmosphere to eliminate the organic binder and sintered at 1650-1900 deg.C for 2-10hr in a non-oxidizing atmosphere to obtain a sintered AlN material having an average crystal grain diameter of 1-4mum, a thermal conductivity of >=150w/m.k and a three-point bending strength of >=50kg/mm<2>. |
