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发明名称
METHOD FOR MANUFACTURING SPECIMEN FOR SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
KR100552560(B1)
申请公布日期
2006.02.08
申请号
KR20040117684
申请日期
2004.12.31
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
LEE, WON HAK
分类号
H01L21/301
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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