COATING PROCESSING METHOD, COMPUTER STORAGE MEDIUM, AND COATING PROCESSING DEVICE

摘要

In the present invention, a coating processing method in which a coating liquid is coated onto a substrate involves the following: a solvent liquid-film forming step in which a first liquid film is formed by a solvent on a central portion of the substrate, and a ring-shaped second liquid film having a greater thickness than the first liquid film is formed by the solvent on the outer peripheral portion of the substrate; a coating liquid supply step in which the coating liquid is supplied to the central portion of the substrate while the substrate is caused to rotate at a first rotational speed; and a coating liquid dispersion step in which the substrate is caused to rotate at a second rotational speed, that is faster than the first rotational speed, while the coating liquid is supplied, thereby dispersing the coating liquid onto the substrate.