METHOD OF MEASURING ION AND APPARATUS USING THE SAME,申请号KR20030063793-传众专利搜索

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发明名称	METHOD OF MEASURING ION AND APPARATUS USING THE SAME
摘要
申请公布号	KR100550350(B1)	申请公布日期	2006.02.08
申请号	KR20030063793	申请日期	2003.09.15
申请人		发明人
分类号	H01L21/66;H01J37/20;H01J49/00;H01J49/04	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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