| 摘要 |
<p>A fluid flow control device (5) includes an inlet (120) for passing a fluid into the device, and an outlet (125) for passing the fluid from the device. The device also may include a pressure regulating portion (15,20) configured to receive the fluid and to deliver the fluid at a controlled pressure. The device further may include a flow control valving portion (35) configured to receive the fluid delivered by the pressure regulating portion and to deliver the fluid at a controlled flow rate. In addition, the device may include a flow meter (25) configured to measure the flow rate of the fluid, and a controller (115) that controls at least the flow control valving portion according at least the flow measured by the flow meter. In some examples, the device may be used to pass fluid to a semiconductor processing tool and/or to blend multiple fluids.</p> |
