Method for depositing thin film on a wafer and a thin film structure manufactured by the same,申请号KR20030092617-传众专利搜索

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发明名称	Method for depositing thin film on a wafer and a thin film structure manufactured by the same
摘要
申请公布号	KR100550338(B1)	申请公布日期	2006.02.08
申请号	KR20030092617	申请日期	2003.12.17
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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