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经营范围
发明名称
WIDE TEMPERATURE RANGE CHUCK SYSTEM
摘要
申请公布号
EP1623452(A1)
申请公布日期
2006.02.08
申请号
EP20040760895
申请日期
2004.05.06
申请人
AXCELIS TECHNOLOGIES INC.
发明人
WANG, ALBERT
分类号
H01L21/00;(IPC1-7):H01L21/00;C23C16/458
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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