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发明名称
APPARATUS FOR CLEANING SEMICONDUCTOR
摘要
申请公布号
KR20060012463(A)
申请公布日期
2006.02.08
申请号
KR20040061164
申请日期
2004.08.03
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JANG HOON
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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