发明名称 Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions
摘要 Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions are described. In one embodiment, a capacitor storage node is formed having an uppermost surface and an overlying insulative material over the uppermost surface. Subsequently, a capacitor dielectric functioning region is formed discrete from the overlying insulative material operably proximate at least a portion of the capacitor storage node. A cell electrode layer is formed over the capacitor dielectric functioning region and the overlying insulative material.
申请公布号 US6995059(B2) 申请公布日期 2006.02.07
申请号 US20030627468 申请日期 2003.07.25
申请人 MICRON TECHNOLOGY, INC. 发明人 LOWREY TYLER A.;TRAN LUAN C.;REINBERG ALAN R.;DURCAN MARK
分类号 H01L21/8242;H01L27/108;H01L21/02 主分类号 H01L21/8242
代理机构 代理人
主权项
地址