发明名称 |
Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions |
摘要 |
Methods of forming capacitors, methods of forming capacitor-over-bit line memory circuitry, and related integrated circuitry constructions are described. In one embodiment, a capacitor storage node is formed having an uppermost surface and an overlying insulative material over the uppermost surface. Subsequently, a capacitor dielectric functioning region is formed discrete from the overlying insulative material operably proximate at least a portion of the capacitor storage node. A cell electrode layer is formed over the capacitor dielectric functioning region and the overlying insulative material.
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申请公布号 |
US6995059(B2) |
申请公布日期 |
2006.02.07 |
申请号 |
US20030627468 |
申请日期 |
2003.07.25 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
LOWREY TYLER A.;TRAN LUAN C.;REINBERG ALAN R.;DURCAN MARK |
分类号 |
H01L21/8242;H01L27/108;H01L21/02 |
主分类号 |
H01L21/8242 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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