发明名称 Semiconductor device having ferroelectric capacitors
摘要 Disclosed is a semiconductor device comprising a semiconductor substrate, an insulating region provided on the semiconductor substrate, a first capacitor provided above the insulating region, a second capacitor provided above the insulating region and adjacent to the first capacitor, a conductive hydrogen-barrier film which prevents diffusion of hydrogen into the first and second capacitors and connects a bottom electrode of the first capacitor with a bottom electrode of the second capacitor, the conductive hydrogen-barrier film having a first portion interposing between the insulating region and the first capacitor and between the insulating region and the second capacitor.
申请公布号 US6995417(B2) 申请公布日期 2006.02.07
申请号 US20040924854 申请日期 2004.08.25
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 YAMAZAKI SOICHI;YAMAKAWA KOJI
分类号 H01L27/105;H01L27/108;H01L21/02;H01L21/8246;H01L27/115;H01L29/94 主分类号 H01L27/105
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