METHOD OF SUCKING WATER AND WATER SUCKING DEVICE

摘要

The method of sucking water is capable of easily removing excess water included in a backing member (12) adhered on a plate (10) of a polishing apparatus. In the method, the excess water is removed from the backing member (12) by the steps of: pressing a water absorbing member (22) onto a holding surface of the backing member (12), on which the work piece is adhered and held, so as to absorb the excess water from the backing member (12); and sucking the excess water absorbed by the water absorbing member (22).