发明名称 Membrane gas valve for pulsing a gas
摘要 A gas valve for pulsing a gas comprises a housing having an inlet port, an outlet port, a membrane, and an actuator, wherein the actuator selectively engages the membrane with the inlet port. In one embodiment, a plurality of the gas valves are coupled together to form an apparatus for synchronized pulsing of a plurality of individual gases.
申请公布号 US6994319(B2) 申请公布日期 2006.02.07
申请号 US20030354600 申请日期 2003.01.29
申请人 APPLIED MATERIALS, INC. 发明人 YUDOVSKY JOSEPH
分类号 F16K31/44;C23C16/44;C23C16/455;F16K31/04;F16K31/524 主分类号 F16K31/44
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