Transport system with multiple-load-port stockers

摘要

A transport system for a fabrication system. The fabrication system contains a plurality of tools for processing articles. The transport system contains a stocker subsystem and a track subsystem. The stocker subsystem contains a stocker body for storing the articles and a plurality of load ports. The load ports are located on the stocker body, enabling the articles to be transferred between the stocker body and the track subsystem. The number of the load ports depends on properties of the tools. The track subsystem contains a delivery part and a load part, wherein the load part contains a plurality of branches corresponding to the load ports.