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发明名称
APPARATUS FOR QUICK CACHING RESIDUAL PRODUCTS IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060012057(A)
申请公布日期
2006.02.07
申请号
KR20040060756
申请日期
2004.08.02
申请人
NA, MYUNG SOO
发明人
NA, MYUNG SOO
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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