| 摘要 |
A lump management apparatus comprising a management computer which is connected with inspection/manufacturing apparatus computers, and includes a transmission/reception function to transmit/receive each information item of the operation conditions set to the respective inspection/manufacturing apparatuses or the maintenance information from each sensor unit to/from the respective apparatus computers, a change function to intensively manage the operation conditions set to the respective apparatus computers in a lump and change the operation conditions in a lump with respect to the computer of the specified each inspection/manufacturing apparatus, a notification function to intensively manage the maintenance information from each sensor unit in a lump, predict an abnormality of the respective inspection/manufacturing apparatuses, and notify a warning at the time of occurrence of the abnormality, and a display function to display each information item of the operation conditions of the respective inspection/manufacturing apparatuses and the like on the same screen of a monitor device. |
