TEMPERATURE CONTROLLER FOR ELECTROSTATIC CHUCK,申请号KR20040115166-传众专利搜索

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发明名称	TEMPERATURE CONTROLLER FOR ELECTROSTATIC CHUCK
摘要
申请公布号	KR100551900(B1)	申请公布日期	2006.02.06
申请号	KR20040115166	申请日期	2004.12.29
申请人	DONGBUANAM SEMICONDUCTOR INC.	发明人	PARK, RAE CHOON
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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