A Lithographic Projection Mask, a Device Manufacturing Method Using a Lithographic Projection Mask and a Device Manufactured Thereby,申请号KR20030092892-传众专利搜索

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发明名称	A Lithographic Projection Mask, a Device Manufacturing Method Using a Lithographic Projection Mask and a Device Manufactured Thereby
摘要
申请公布号	KR100549781(B1)	申请公布日期	2006.02.06
申请号	KR20030092892	申请日期	2003.12.18
申请人		发明人
分类号	G01B11/00;G03F9/00;H01L21/027	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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