Micromechanical device e.g. sensor for automotive engineering field, has passivation agent surrounding micromechanical sensor unit using heating units that are controlled according to temperature of passivation agent

摘要

The device has a micromechanical sensor unit (120) and /or a passivation agent (160) e.g. gel, surrounding the sensor unit using heating units (200, 210, 220, 230). The heating units are controlled according to a temperature value representing the temperature of the passivation agent. The sensor unit and/or the agent are heated above the temperature of a corrosive environment surrounding the device. An independent claim is also included for a method for controlling and/or adjusting the heating power of a heating unit in a micromechanical device.