发明名称 PROCEDE DE TRAITEMENT PAR FAISCEAU D'IONS FOCALISE ET DISPOSITIF SEMI-CONDUCTEUR CONVENANT POUR SA MISE EN OEUVRE
摘要 The process involves breaking down an insulator oxide layer of a substrate below an active zone of a structure that links active zone (31) to a metallic line, by submitting the line to a focused metallic beam. An electric link is created between another metallic line and the former line. A semiconductor device having the latter line is processed by the ion beams and the electric link between the metallic lines is opened. An Independent claim is also included for a semi-conductor device established at a surface of an insulating silicon substrate.
申请公布号 FR2851370(B1) 申请公布日期 2006.02.03
申请号 FR20030002008 申请日期 2003.02.19
申请人 STMICROELECTRONICS SA 发明人 PARRASSIN THIERRY
分类号 H01L21/265;H01L21/768;H01L23/525;H01L23/60;(IPC1-7):H01L21/265 主分类号 H01L21/265
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