发明名称 |
Low dielectric constant carbon films |
摘要 |
Diamond and non-diamond composite film may be exposed to oxygen plasma to gasify the non-diamond forms of carbon, leaving porosity in the resulting structure. In some cases, highly desirable dielectric materials may be formed with high dielectric constants and good mechanical strength.
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申请公布号 |
US2006024977(A1) |
申请公布日期 |
2006.02.02 |
申请号 |
US20050231578 |
申请日期 |
2005.09.21 |
申请人 |
RAVI KRAMADHATI V;GARNER MICHAEL C |
发明人 |
RAVI KRAMADHATI V.;GARNER MICHAEL C. |
分类号 |
C23C16/26;H01L21/31;H01L21/768;H01L29/15 |
主分类号 |
C23C16/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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