| 发明名称 |
Novel ultra-violet assisted anisotropic etching of PET |
| 摘要 |
A method for etching a substrate is described wherein a substrate is positioned in a solution of solvent and the substrate is exposed to excitation energy. The method may be applied to the production of thermocouple devices wherein the substrate is poly-ethylene-terephthalate.
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| 申请公布号 |
US2006024848(A1) |
申请公布日期 |
2006.02.02 |
| 申请号 |
US20050189285 |
申请日期 |
2005.07.26 |
| 申请人 |
MOHAMMADI SAEED;MOHAJERZADEH SHAMSUDDIN;MALEKI TEIMOR |
发明人 |
MOHAMMADI SAEED;MOHAJERZADEH SHAMSUDDIN;MALEKI TEIMOR |
| 分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
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