ALUMINUM PLASMA CHAMBER HAVING ONE BODY SEALING MEMBER

摘要

Disclosed is an aluminum plasma chamber having a one body sealing member. The present invention provides an aluminum plasma chamber capable of maintaining airtightness of the inside of the chamber, as well as reducing the manufacturing cost and time of the aluminum plasma chamber, and improving the surface treatment by separately processing a chamber lid, each of four plates constituting chamber walls, and a chamber bottom, which constitute the aluminum plasma chamber, to connect them to each other using a connecting member such as a bolt, as well as inserting one body sealing members into coupling regions between the chamber lid, each plate constituting the chamber wall, and the chamber bottom.