SUCKING DEVICE, METHOD OF CARRYING PLATE-LIKE MEMBER, AND METHOD OF MANUFACTURING LIQUID CRYSTAL DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a sucking device capable of securely suck and fix a sucked object without damaging it irrespective of whether the sucked object is large or not.

SOLUTION: This sucking device comprises a sucking stage 2 having a support surface 2a supporting the sucked object G and having holes 2c formed in the support surface 2a, a permeable porous member 11 installed on the sucking stage 2 so as to cover the support surface 2a, and a vacuum pump 10 generating a vacuum pressure in the holes 2c to suck and fix the sucked object G on the porous member 11. The porous member 11 is formed of an elastic organic material.

COPYRIGHT: (C)2006,JPO&NCIPI