| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanning microscope device which can be miniaturized while avoiding interruption in the field of view of a stereomicroscope as much as possible and which reduces astigmatism to give a high-quality image. SOLUTION: The optical scanning microscope 1 is equipped with: a light source; a light transmitting member 17 which transmits light from the light source; a device body 11 which irradiates a specimen with the light transmitted by the transmitting member 17; and a photodetector which detects the light returning from the specimen via the device main body 11 and the light transmitting member 17. The device main body 11 is equipped with: a collimating optical system 36 which collimates the light transmitted by the transmitting member 17 into parallel light; a scanning mirror 30 which deflects the parallel light emitted from the collimating optical system 36 by a deflection angle smaller than 90°and allows the light to scan the specimen; a condensing optical system which converges the scanning light by the scanning mirror 30 onto the specimen; and an pupil projection optical system disposed between the condensing optical system and the scanning mirror 30. COPYRIGHT: (C)2006,JPO&NCIPI
|
